Measurement of optical and electrical properties of silicon microstructuring induced by ArF excimer laser at SF 6 atmosphere
| Autor: | Bassam, M.A., Parvin, P., Sajad, B., Moghimi, A., Coster, H. |
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| Zdroj: | In Applied Surface Science 2008 254(9):2621-2628 |
| Databáze: | ScienceDirect |
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