Effect of laser annealing on crystallinity of the Si layers in Si/SiO 2 multiple quantum wells
| Autor: | Arguirov, T., Mchedlidze, T., Akhmetov, V.D., Kouteva-Arguirova, S., Kittler, M., Rölver, R., Berghoff, B., Först, M., Bätzner, D.L., Spangenberg, B. |
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| Zdroj: | In Applied Surface Science 2007 254(4):1083-1086 |
| Databáze: | ScienceDirect |
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