Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications

Autor: Yan, Zhi a, b, ⁎, Song, Zhitang a, Liu, Weili a, Ren, Hongxuan c, Gu, Ning c, Zhou, Xiaoyuan b, Zhang, Li b, Wang, Yu b, Feng, Songlin a, Lai, Lihui d, Chen, Jianzhao d
Zdroj: In Applied Surface Science 2007 253(24):9372-9380
Databáze: ScienceDirect