Formation of silicon nanodots from dysprosium-doped amorphous SiC xO y films grown by hot-filament assisted chemical vapor deposition of CH 3SiH 3 and Dy(DPM) 3 gas jets
| Autor: | Ikoma, Yoshifumi, Masaki, Takayoshi, Kawai, Shinji, Motooka, Teruaki |
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| Zdroj: | In Applied Surface Science 2007 253(21):8657-8660 |
| Databáze: | ScienceDirect |
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