Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
| Autor: | Petrović, Z.Lj., Raspopović, Z.M., Stojanović, V.D., Jovanović, J.V., Malović, G., Makabe, T., de Urquijo, J. |
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| Zdroj: | In Applied Surface Science 15 June 2007 253(16):6619-6640 |
| Databáze: | ScienceDirect |
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