Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry
| Autor: | Shinohara, Masanori, Shibata, Hiromichi, Cho, Ken, Nakatani, Tatsuyuki, Okamoto, Keishi, Matsuda, Yoshinobu, Fujiyama, Hiroshi |
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| Zdroj: | In Applied Surface Science 2007 253(14):6242-6247 |
| Databáze: | ScienceDirect |
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