Effect of plasma treatment on interface property of BCN/GaN structure
Autor: | Shimada, Yoshiaki, Chikamatsu, Kentaro, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi |
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Zdroj: | In Applied Surface Science 2006 253(3):1459-1463 |
Databáze: | ScienceDirect |
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