Structural and photo-luminescence properties of nanocrystalline silicon films deposited at low temperature by plasma-enhanced chemical vapor deposition
| Autor: | Ali, Atif Mossad, Inokuma, Takao, Hasegawa, Seiichi |
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| Zdroj: | In Applied Surface Science 2006 253(3):1198-1204 |
| Databáze: | ScienceDirect |
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