Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma
| Autor: | Shinohara, Masanori, Iwatsuji, Keitaro, Katagiri, Teruaki, Shibata, Hiromichi, Matsuda, Yoshinobu, Fujiyama, Hiroshi |
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| Zdroj: | In Applied Surface Science 2006 252(24):8589-8592 |
| Databáze: | ScienceDirect |
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