Effect of process parameters on surface morphology and characterization of PE-ALD SnO 2 thin films for gas sensing
| Autor: | Choi, Gwangpyo, Satyanarayana, L., Park, Jinseong |
|---|---|
| Zdroj: | In Applied Surface Science 2006 252(22):7878-7883 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect