The study of ion mixed amorphous carbon films on single crystal silicon by C ion implantation
| Autor: | Sun, Rong a, b, c, Xu, Tao a, Zhang, Jing-wei b, Xue, Qun-ji a, ⁎ |
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| Zdroj: | In Applied Surface Science 2006 252(12):4236-4243 |
| Databáze: | ScienceDirect |
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