Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM
| Autor: | Dittmar, Kornelia *, Engelmann, Hans-Jürgen, Peikert, M., Wieser, E., Borany, J.V. |
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| Zdroj: | In Applied Surface Science 2005 252(1):185-188 |
| Databáze: | ScienceDirect |
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