Range evaluation in SIMS depth profiles of Er-implantations in silicon
| Autor: | Mayerhofer, K., Foisner, H., Piplits, K., Hobler, G., Palmetshofer, L., Hutter, H. * |
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| Zdroj: | In Applied Surface Science 2005 252(1):271-277 |
| Databáze: | ScienceDirect |
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