Pulsed laser deposition of HfO 2 and Pr xO y high-k films on Si(100)
| Autor: | Ratzke, M. *, Wolfframm, D., Kappa, M., Kouteva-Arguirova, S., Reif, J. |
|---|---|
| Zdroj: | In Applied Surface Science 2005 247(1):128-133 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Ratzke, M. *, Wolfframm, D., Kappa, M., Kouteva-Arguirova, S., Reif, J. |
|---|---|
| Zdroj: | In Applied Surface Science 2005 247(1):128-133 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect