Spectroscopic ellipsometry on sinusoidal surface-relief gratings

Autor: Antos, R. *, Ohlidal, I., Franta, D., Klapetek, P., Mistrik, J., Yamaguchi, T., Visnovsky, S.
Zdroj: In Applied Surface Science 2005 244(1):221-224
Databáze: ScienceDirect