Simulation of growth process of thin film on non-planar substrate
Autor: | Qi, H.J. *, Shao, J.D., Zhang, D.P., Yi, K., Fan, Z.X. |
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Zdroj: | In Applied Surface Science 2005 249(1):85-90 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Qi, H.J. *, Shao, J.D., Zhang, D.P., Yi, K., Fan, Z.X. |
---|---|
Zdroj: | In Applied Surface Science 2005 249(1):85-90 |
Databáze: | ScienceDirect |
Externí odkaz: |