Formation of silicon on plasma synthesized SiO xN y and reaction mechanism
| Autor: | Zhu, Ming, Shi, Xuejie, Chen, Peng, Liu, Weili, Wong, Man, Lin, Chenglu, Chu, Paul K. * |
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| Zdroj: | In Applied Surface Science 2005 243(1):89-95 |
| Databáze: | ScienceDirect |
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