Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test
| Autor: | Toujou, F., Yoshikawa, S., Homma, Y., Takano, A., Takenaka, H., Tomita, M., Li, Z., Hasegawa, T., Sasakawa, K., Schuhmacher, M., Merkulov, A., Kim, H.K., Moon, D.W., Hong, T., Won, J.-Y. |
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| Zdroj: | In Applied Surface Science 2004 231:649-652 |
| Databáze: | ScienceDirect |
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