Depth profiling of ZrO 2/SiO 2/Si stacks—a TOF-SIMS and computer simulation study
| Autor: | Ignatova, V.A., Conard, T., Möller, W., Vandervorst, W., Gijbels, R. |
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| Zdroj: | In Applied Surface Science 2004 231:603-608 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ignatova, V.A., Conard, T., Möller, W., Vandervorst, W., Gijbels, R. |
|---|---|
| Zdroj: | In Applied Surface Science 2004 231:603-608 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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