Silicalite-1/polymer films with low-k dielectric constants
| Autor: | Larlus, O., Mintova, S., Valtchev, V., Jean, B., Metzger, T.H., Bein, T. |
|---|---|
| Zdroj: | In Applied Surface Science 15 March 2004 226(1-3):155-160 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Larlus, O., Mintova, S., Valtchev, V., Jean, B., Metzger, T.H., Bein, T. |
|---|---|
| Zdroj: | In Applied Surface Science 15 March 2004 226(1-3):155-160 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect