Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering
| Autor: | Chappé, J.-M., Martin, N., Pierson, J.F., Terwagne, G., Lintymer, J., Gavoille, J., Takadoum, J. |
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| Zdroj: | In Applied Surface Science 2004 225(1):29-38 |
| Databáze: | ScienceDirect |
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