Nucleation and growth of nanocrystalline silicon studied by TEM, XPS and ESR

Autor: Sato, Keisuke, Izumi, Tomio, Iwase, Mitsuo, Show, Yoshiyuki, Morisaki, Hiroshi, Yaguchi, Toshie, Kamino, Takeo
Zdroj: In Applied Surface Science 2003 216(1):376-381
Databáze: ScienceDirect