Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates
| Autor: | Caricato, A.P., Di Cristoforo, A., Fernández, M., Leggieri, G., Luches, A., Majni, G., Martino, M., Mengucci, P. |
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| Zdroj: | In Applied Surface Science 2003 208:615-619 |
| Databáze: | ScienceDirect |
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