Nature effect of the gas during high temperature treatments of 4H-SiC substrates
| Autor: | Younes, Ghassan, Ferro, Gabriel, Jacquier, Christophe, Dazord, Jacques, Monteil, Yves |
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| Zdroj: | In Applied Surface Science 2003 207(1):200-207 |
| Databáze: | ScienceDirect |
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