Multiple As delta layered Si thin films for SIMS quantification and depth scale calibration

Autor: Cho, S.B, Shon, H.K, Kang, H.J, Hong, T.E, Kim, H.K, Lee, H.I, Kim, K.J, Moon, D.W
Zdroj: In Applied Surface Science 2003 203:302-305
Databáze: ScienceDirect
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