D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides
| Autor: | Bersani, M, Giubertoni, D, Barozzi, M, EIacob, E, Vanzetti, L, Anderle, M, Lazzeri, P, Crivelli, B, Zanderigo, F |
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| Zdroj: | In Applied Surface Science 2003 203:281-284 |
| Databáze: | ScienceDirect |
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