A quantitative adhesion study between contacting materials in Cu damascene structures
| Autor: | Lanckmans, F, Brongersma, S.H, Varga, I, Poortmans, S, Bender, H, Conard, T, Maex, K |
|---|---|
| Zdroj: | In Applied Surface Science 2002 201(1):20-34 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect