Negative ions in processing plasmas and their effect on the plasma structure
| Autor: | Kono, Akihiro |
|---|---|
| Zdroj: | In Applied Surface Science 2002 192(1):115-134 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Kono, Akihiro |
|---|---|
| Zdroj: | In Applied Surface Science 2002 192(1):115-134 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect