Ga, N solubility limit in co-implanted ZnO measured by secondary ion mass spectrometry

Autor: Komatsu, Manabu, Ohashi, Naoki, Sakaguchi, Isao, Hishita, Shunichi, Haneda, Hajime
Zdroj: In Applied Surface Science 2002 189(3):349-352
Databáze: ScienceDirect