High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems
| Autor: | Takeyama, Mayumi B., Itoi, Takaomi, Aoyagi, Eiji, Noya, Atsushi |
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| Zdroj: | In Applied Surface Science 2002 190(1):450-454 |
| Databáze: | ScienceDirect |
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