Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping
| Autor: | Kerrien, G, Boulmer, J *, Débarre, D, Bouchier, D, Grouillet, A, Lenoble, D |
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| Zdroj: | In Applied Surface Science 2002 186(1):45-51 |
| Databáze: | ScienceDirect |
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