The electrical properties of MIS capacitors with ALN gate dielectrics
| Autor: | Adam, T *, Kolodzey, J, Swann, C.P, Tsao, M.W, Rabolt, J.F |
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| Zdroj: | In Applied Surface Science 15 May 2001 175-176:428-435 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Adam, T *, Kolodzey, J, Swann, C.P, Tsao, M.W, Rabolt, J.F |
|---|---|
| Zdroj: | In Applied Surface Science 15 May 2001 175-176:428-435 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect