Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
| Autor: | Dragnea, Bogdan, Preusser, Jan, Szarko, Jodi M, McDonough, Laurie A, Leone, Stephen R *, Hinsberg, William D |
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| Zdroj: | In Applied Surface Science 15 May 2001 175-176:783-789 |
| Databáze: | ScienceDirect |
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