Low-temperature silicon nitride for thin-film electronics on polyimide foil substrates
| Autor: | Gleskova, H. *, Wagner, S., Gašparı́k, V., Kováč, P. |
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| Zdroj: | In Applied Surface Science 15 May 2001 175-176:12-16 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Gleskova, H. *, Wagner, S., Gašparı́k, V., Kováč, P. |
|---|---|
| Zdroj: | In Applied Surface Science 15 May 2001 175-176:12-16 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect