F2 laser etching of GaN
| Autor: | Akane, T. *, Sugioka, K., Nomura, S., Hammura, K., Aoki, N., Toyoda, K., Aoyagi, Y., Midorikawa, K. |
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| Zdroj: | In Applied Surface Science 15 December 2000 168(1-4):335-339 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Akane, T. *, Sugioka, K., Nomura, S., Hammura, K., Aoki, N., Toyoda, K., Aoyagi, Y., Midorikawa, K. |
|---|---|
| Zdroj: | In Applied Surface Science 15 December 2000 168(1-4):335-339 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect