Surface charge analysis characterisation of ultraviolet-induced damage in silicon nitride dielectrics
| Autor: | Korowicz, D.H., Kelly, P.V. *, Mongey, K.F., Crean, G.M. |
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| Zdroj: | In Applied Surface Science 15 December 2000 168(1-4):304-306 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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