Atomic-scale surface morphology of ultrathin thermal oxide formed on Si(100) surface
| Autor: | Fujimura, Masaaki, Inoue, Kouta, Nohira, Hiroshi, Hattori, Takeo * |
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| Zdroj: | In Applied Surface Science 2000 162:62-68 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Fujimura, Masaaki, Inoue, Kouta, Nohira, Hiroshi, Hattori, Takeo * |
|---|---|
| Zdroj: | In Applied Surface Science 2000 162:62-68 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect