Processing of n+/p−/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
| Autor: | Härkönen, J., Tuovinen, E., Luukka, P., Gädda, A., Mäenpää, T., Tuominen, E., Arsenovich, T., Junkes, A., Wu, X., Li, Z. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 21 August 2016 828:46-51 |
| Databáze: | ScienceDirect |
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