Update on scribe–cleave–passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance
Autor: | Fadeyev, V., Ely, S., Galloway, Z., Ngo, J., Parker, C., Sadrozinski, H.F.-W., Christophersen, M., Phlips, B.F., Pellegrini, G., Rafi, J.M., Quirion, D., Dalla Betta, G.-F., Boscardin, M., Casse, G., Gorelov, I., Hoeferkamp, M., Metcalfe, J., Seidel, S., Gaubas, E., Ceponis, T., Vaitkus, J.V. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 21 November 2014 765:59-63 |
Databáze: | ScienceDirect |
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