Measurement of nanometer electron beam sizes with laser interference using Shintake Monitor
Autor: | Yan, Jacqueline, Yamaguchi, Yohei, Kamiya, Yoshio, Komamiya, Sachio, Oroku, Masahiro, Okugi, Toshiyuki, Terunuma, Nobuhiro, Kubo, Kiyoshi, Tauchi, Toshiaki, Urakawa, Junji |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 11 March 2014 740:131-137 |
Databáze: | ScienceDirect |
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