The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability
Autor: | Alcock, S.G., Sawhney, K.J.S., Scott, S., Pedersen, U., Walton, R., Siewert, F., Zeschke, T., Senf, F., Noll, T., Lammert, H. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2010 616(2):224-228 |
Databáze: | ScienceDirect |
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