The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

Autor: Alcock, S.G., Sawhney, K.J.S., Scott, S., Pedersen, U., Walton, R., Siewert, F., Zeschke, T., Senf, F., Noll, T., Lammert, H.
Zdroj: In Nuclear Inst. and Methods in Physics Research, A 2010 616(2):224-228
Databáze: ScienceDirect