Chemical characterization of SiC xN y nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS
| Autor: | Baake, O., Fainer, N.I., Hoffmann, P., Kosinova, M.L., Rumyantsev, Yu.M., Trunova, V.A., Klein, A., Ensinger, W., Pollakowski, B., Beckhoff, B., Ulm, G. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2009 603(1):174-177 |
| Databáze: | ScienceDirect |
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