Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging
Autor: | Aliane, A., Agnese, P., Pigot, C., Sauvageot, J.-L., de Moro, F., Ribot, H., Gasse, A., Szeflinski, V., Gobil, Y. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2008 594(2):210-214 |
Databáze: | ScienceDirect |
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