Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging

Autor: Aliane, A., Agnese, P., Pigot, C., Sauvageot, J.-L., de Moro, F., Ribot, H., Gasse, A., Szeflinski, V., Gobil, Y.
Zdroj: In Nuclear Inst. and Methods in Physics Research, A 2008 594(2):210-214
Databáze: ScienceDirect