Facility for simultaneous dual-beam ion implantation
| Autor: | Kaschny, J.R., Kögler, R., Tyrrof, H., Bürger, W., Eichhorn, F., Mücklich, A., Serre, C., Skorupa, W. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2005 551(2):200-207 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect