Oxidation study of Sb + implanted Si(1 0 0) and Si(1 1 1) targets. Use of high-resolution RBS technique
| Autor: | Labbani, R *, Halimi, R |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2004 521(1):30-34 |
| Databáze: | ScienceDirect |
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