Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image
| Autor: | Sato, Mitsugu a, *, Ishitani, Tohru a, Watanabe, Shunya b, Nakagawa, Mine b |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 2004 519(1):280-285 |
| Databáze: | ScienceDirect |
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