Dynamic Monte Carlo simulation for SIMS depth profiling of delta-doped layer
| Autor: | Kang, H.J. *, Kim, W.S., Moon, D.W., Lee, H.Y., Kang, S.T., Shimizu, R. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1999 153(1):429-435 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect