Wave-ordered structures formed on SOI wafers by reactive ion beams
| Autor: | Smirnov, V.K. *, Kibalov, D.S., Krivelevich, S.A., Lepshin, P.A., Potapov, E.V., Yankov, R.A., Skorupa, W., Makarov, V.V., Danilin, A.B. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1999 147(1):310-315 |
| Databáze: | ScienceDirect |
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