Effect of oxygen on ion-beam induced synthesis of SiC in silicon
| Autor: | Artamonov, V.V., Valakh, M.Ya., Klyui, N.I. *, Melnik, V.P., Romanyuk, A.B., Romanyuk, B.N., Yuhimchuk, V.A. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1999 147(1):256-260 |
| Databáze: | ScienceDirect |
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