Electrically active defects in BF 2+ implanted and germanium preamorphized silicon

Autor: Boussaid, Farid, Benzohra, Mohammed, Olivie, François, Alquier, Daniel, Martinez, Augustin
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 1998 134(2):195-201
Databáze: ScienceDirect